C08500 - SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC) StdPbc-1119 This Guide define acceptable CMP

This Guide define acceptable CMP criteria of TSV in terms of dishing

種々の融着継手設計や製造者における比較のために本方法を使用する場合には，ユーザは評価されるべきチューブや融着継手を明確に選択しなければならない。

As long as liquid is present in the cylinder

SEMI M31 — Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers

C08500 - SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC) StdPbc-1119 This Guide define acceptable CMPThe purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified. The scope of this Document covers MIBC which is used in the semiconductor industry. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals