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Flow Curve
SEMI E5-1103 (technical revision)
cosmetics or any material that may come in contact with the test material
general contractors
P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 Flow CurveThis Specification covers the general requirements for pellicles used on photomasks or reticles in photolithographic exposure systems. This Specification covers pellicles for use in either broadband, polychromatic or monochromatic exposure systems. Referenced SEMI Standards (purchase separately) None. Revision History SEMI P5 0416 (Reapproved 1221) SEMI P5 0416 (technical revision) SEMI P5 0704 (technical revision) SEMI P5 94 (Reapproved 1103) SEMI P5
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