E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) StdPbc-1223 This Specification defines a mechanical

This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs

SEMI PV50-0114 (Reapproved 1220)

Semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls

本スタンダードは2003年10月に編集上の修正がなされた。§§§3

E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) StdPbc-1223 This Specification defines a mechanicalNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the tool side of the interface between a process or metrology tool and a front opening box. This Standard is intended to set an appropriate level of specification that places minimal limits on