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1-0699 (technical revision)
sensitivity is higher (and therefore the detection limit lower)
When site specifications differ
The interface specified in this Standard can be for a sealed mini-environment
M05900 - SEMI M59 - Terminology for Silicon Technology StdTpc-Electronic Data Interchange 1-0699 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Silicon technology underlies the integrated circuit and device industry. To promote common understanding and correct communication between suppliers and customers and others in the field, terms used in this field should be
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